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Illumination Modelling: Wafer Inspection


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Wafer Inspection Illumination System



Automated inspection equipment is common in semiconductor manufacturing. A prominent OEM in this industry was considering modifying a long standing design used in their
illumination system. It was thought that long life, high power LED technology could replace tungsten halogen technology as a light source. Before an involved development effort was allocated to tackle the problem, a top level analysis was required to justify the money and time investment to potentially improve the existing system. The proposed system could easily be modeled and the performance compared with existing optical data taken from the current system. The diagram shows a simple model of the proposed system.

The optical modeling showed that even using the highest power LED available at the time, the irradiance of the proposed system was approximately 50% of the levels required. With the rapid improvements in LED radiance levels, it was anticipated that within 1yr. the technology
could be at the required levels.


Lichtstrahlenmodell (Waferinspektion)

Raytrace model


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Beleuchtungsprofil (Waferinspektion)

Illumination profile


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